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      有機硅品牌有機硅用途有機硅產品中文 | English | 日本語

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      MEMS單晶硅片

      MEMS單晶硅片

      東莞市建盟化學有限公司經銷世界知名品牌MEMS單晶硅片產品。MEMS單晶硅片生長方式,等級,直徑,厚度,表面處理,晶向,晶向偏角,摻雜類型,電阻率,薄膜,加工服務。

      產品詳情

       

      Czochralski

      Float Zone

      Float Zone

      Diameter

      100-150 mm

      50-150 mm*

      100-150 mm*

      Crystal orientation

      <100> <111>

      <100> <111>

      <100> <111>

      Orientation accuracy

      <0.5°

      <0.5°

      <0.5°

      Type and dopant

      Undoped, n-type,
      p-type

      Undoped, n-type,
      p-type

      Undoped, n-type,
      p-type

      Dopant

      As, B, P, and Sb

      P, B

      P, B

      Bulk resistivity

      0.001-60

      1-30,000

      1-30,000

      Bulk lifetime

      >20 μs

      >1,000 μs

      >1,000 μs

      Wafer thickness

      200-1,500 μm

      200-1,500 μm

      200-1,500 μm

      Wafer thickness
      tolerance

      ±15 μm

      ±15 μm

      ±5 μm

      TTV

      <5 μm or <9 μm

      <5 μm or <9 μm

      <2.5 μm

      TIR

      <3 μm

      <3 μm

      <1 μm

      Wafer surface finish

      Single side polished,
      Double side polished

      Single side
      polished

      Double side
      polished


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